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Description

Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires' properties. Nanowire pick-place has been typically performed via teleoperation, which is time-consuming and highly skill-dependent. This paper presents a robotic system capable of automated pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowires' electromechanical properties. The performance of the nanorobotic pick-up and placement procedures was quantified by experiments. The system demonstrated automated nanowire pick-up and placement with a high reliability.

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